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Wafer BG Terrace Inspection Machine

We will perform auto-alignment and automatic inspection with a high throughput of 30 seconds per sheet.

The terrace width and edges on the top surface of the wafer's outer circumference can be measured and inspected for defects using a line camera. When the wafer is placed on the set plate, auto-alignment and automatic inspection are performed at a high throughput of one wafer every 30 seconds. For more details, please download and view the catalog.

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